ウェハープロセス用クリスタルバック薄膜エッチング装置

Designed for crystal back thin film etching, this automated semiconductor machine uses Bernoulli chuck N2 gas support to hold wafers with minimal contact. It helps reduce handling marks, improve process stability, and support precise backside film removal for wafer and advanced packaging production.

製品形態
愛を分かち合いましょう

This equipment is suitable for etching 6/8/12-inch thinner wafers. It adopts non-contact transfer support, reduces wafer breakage rate, can flatten warped wafers, has high efficiency in chemical recovery, and is more environmentally friendly and energy-saving.