The FOUP cleaning machine is an automatic centrifugal cleaning device, compatible with various wafer cassettes such as SMIF, FOUP, FOSB, and Cassette. It removes particles and metal ions through 360\u00b0 rotation and high-pressure DI water rinsing, followed by centrifugal hot air drying, resulting in excellent cleaning and drying performance. It supports SECS\/GEM200\/300 and complies with SEMI S2 and CE semiconductor standards.<\/p>","protected":false},"excerpt":{"rendered":"
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